This product is a small double-furnaces sliding tube furnace with a quartz tube of Φ50×1400mm and a stainless steel sealing flange. The maximum temperature of the instrument can reach 1200℃. ‘The two furnace bodies can slide on the slide rails to achieve evaporation/sublimation of the raw materials and film deposition. To achieve the fastest heating, the furnace can be preheated to the set temperature and the furnace moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating, which is the ideal furnace for low-cost rapid heat treatment.
At the same time, electric slide rails, mass flow meter (MFC) controlled gas supply system and plasma RF power supply can be selected to build the TCVD system.
Application:
The device can be used for graphene preparation, sulfide preparation, and the like.
Micro tube furnace Model CY-O1200-50SDM
Tube material High purity quartz
Tube diameter 50mm(optional 60mm, 80mm, 100mm)
Tube length 1400mm
Furnace chamber length 200mm
Heating zone length 100mm
Operating temperature 0～1100℃
Temperature control accuracy ±1℃
Temperature control mode 30 or 50 segment program temperature control
Display mode Highlight the digital tube digital display
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
Gas supply system Model CY-3F
Gas channel 3-channel
Measuring unit Gas float flow meter
Measuring range A channel: 0～100ml H2 gas Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 16～160ml N2 gas
C channel: 25～250ml Ar gas
measurement accuracy ±2.0%
Pipe pressure resistance 3MPa
Working pressure difference 50～300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface specification 1/4" ferrule connector for gas inlet and outlet
Exhaust system Mechanical pump Rotary vane pump
Pumping rate 1.1L/S
Exhaust interface KF16
Vacuum measurement Resistance gauge
Ultimate vacuum 1.0E-1Pa
Power supply AC:220V 50/60Hz
Pumping interface KF16