Product description of 1200ºC high-vacuum rapid annealing furnace
The 1200ºCrapid annealing furnace is essentially a set of slideway furnace, which realizes the functions of heating and annealing. The intake end is equipped with a high-precision three-way mass flow meter to accurately control the atmosphere in the tube;At the same time, the equipment is equipped with a turbo molecular pump, which can quickly achieve a high vacuum environment and maximize the interference of the air atmosphere to the experiment.
The slideway furnace is composed of 1200ºCstandard single heating zone tube furnace and high precision slide rail.Tube furnace adopts resistance wire heating, combined with polycrystalline fiber furnace chamber, which has excellent temperature rise and thermal insulation performance. The slide rails are tightly matched, slide smoothly, and easy to operate. At the same time, it adopts full-color LCD touch screen operation, which is simple and intuitive, easy to use, can simplify the experimental operation and save the test time.

Technical Parameters of 1200ºC high-vacuum rapid annealing furnace
1200 ºC Tube furnace
Item Detail
Voltage AC220V,50Hz
Max power 4KW
Heating zone Single zone 440mm
Working temperature ≤1200ºC
Temperature control accuracy ±1ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1000mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Mechanical pressure gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen

Three-way mass flowmeter
Item Detail
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (H2)
0~200 SCCM(Ar)
0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz