Product description of Organic-inorganic combined evaporation coating system:
The equipment is mainly composed of an organic/metal source evaporation deposition chamber, a vacuum exhaust system, a vacuum measurement system, an evaporation source, a sample heating temperature control, an electric control system, and a gas distribution system.

Application of Organic-inorganic combined evaporation coating system:
It is suitable for the preparation of metal elemental film, semiconductor film, oxide film, organic film, etc. It can be used in scientific research units for research of new materials and new process films, as well as for testing before mass production.
The user group of OPV series vacuum evaporation coating and glove box joint system is the research institute and laboratory. The vacuum evaporation system studio is placed in the Glove box anhydrous, oxygen-free, dust-free ultra-pure environment, PVD and Glove box hardware. Seamless butt joint, control integration, widely used in organic, inorganic, perovskite thin film solar cells, OLED and other research fields.


Technical specifications of Organic-inorganic combined evaporation coating system:
Coating chamber coating chamber size: about 600*450*450mm, stainless steel material, square front and rear door opening structure, and anti-fouling board inside.
pumping system molecular pump + mechanical pump pumping system;
vacuum the ultimate vacuum of the coating chamber ≤ 6 *10-4Pa
system leakage rate ≤ 1*10-7PaL / s.
Evaporation source system rganic source evaporation source 4, volume 5ml, 2 evaporation power supply, temperature control temperature, heating temperature 400 ° C, power 0.5Kw;
Baffle The evaporation source baffle adopts automatic magnetic control to control its opening;
Installation The evaporation source is installed on the lower bottom of the vacuum chamber.
sample rack system the sample holder can be placed with a size of Φ120mm sample, glass slide
the sample holder can be rotated, the rotation speed is: 0 ~ 30 rev / min
Installation The sample is installed on the upper cover of the vacuum chamber. The evaporation source is installed on the lower cover of the vacuum chamber, and the coating is evaporated upward. The evaporation source is provided with a baffle device
Temperature the sample in the coating process, with baking heating function, the highest baking heating temperature is: room temperature ~ 180 ° C, temperature control temperature.
Protection The equipment is equipped with a water-breaking and power-off interlocking protection alarm device and an anti-misoperation protection alarm device.
Evaporation source 4 sets of inorganic evaporation source, volume 5ml, 2 sets of evaporation power, heating current 300A, power 3.2Kw;
quartz crystal film thickness control instrument film thickness measurement range 0-999999Å