Desktop single target magnetron coater introduction:
Desktop single target magnetron coater is a high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.
Desktop single target magnetron coater applications:
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.
Desktop single target magnetron coater technical parameters:
Reciprocating sample table size 50*100mm
Reciprocating speed 0~50mm/s
Magnetron target gun Target plane Circular flat target
Sputtering vacuum 10Pa~0.2Pa
Target diameter 2 inches
Target thickness Recommended 2 ~ 5mm
Target temperature <=65ºC
Vacuum chamber Cavity size About Φ180mm × H 215mm
Cavity material High purity quartz
Observation window Omnidirectional transparency
Opening method Removable top cover
power supply DC power supply 150W max
Quantity 1
Molecular pump system Foreline pump
Rotary vane pump VRD-4
Pumping speed 1.1L/S
Ultimate vacuum 5*10-1Pa
Molecular pump Molecular pumping speed 600L/S
Rated speed 24000rpm
Ultimate vacuum 5*10-5Pa
Vibration value <=0.1um
Start Time <=4.5min
Downtime <7min
cooling method Water cooling + air cooling
Water cooler Cooling water temperature <=37ºC
Cooling water flow rate 10L/min
Supply voltage AC220V 50Hz
| Attribute name |
Attribute value |
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Color
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Silver, White |
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Performance
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customizable, Automatic, Excellent, easy operation, multi-function |
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Installation, Training and Setting-up
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Ready to provide advice on installation if needed, The buyer installs with the help of the manual |
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Standards
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Customized according to required standards, Customized with the best quality, CE |
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After sales services
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Lifetime |
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Warranty
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1 Year |