Atmosphere Control Magnetron Coater for Electric Film, Alloy Film, with Reciprocating Movement Sample Table

Desktop single target magnetron coater introduction: Desktop single target magnetron coater is a high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be sele...
Desktop single target magnetron coater introduction:
Desktop single target magnetron coater is a high cost performance magnetron sputtering coating equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Desktop single target magnetron coater applications:
The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Desktop single target magnetron coater technical parameters:
Reciprocating sample table size 50*100mm

Reciprocating speed 0~50mm/s
Magnetron target gun Target plane Circular flat target

Sputtering vacuum 10Pa~0.2Pa

Target diameter 2 inches

Target thickness Recommended 2 ~ 5mm

Target temperature <=65ºC
Vacuum chamber Cavity size About Φ180mm × H 215mm

Cavity material High purity quartz

Observation window Omnidirectional transparency

Opening method Removable top cover
power supply DC power supply 150W max

Quantity 1
Molecular pump system Foreline pump


Rotary vane pump VRD-4


Pumping speed 1.1L/S


Ultimate vacuum 5*10-1Pa

Molecular pump Molecular pumping speed 600L/S


Rated speed 24000rpm


Ultimate vacuum 5*10-5Pa


Vibration value <=0.1um


Start Time <=4.5min


Downtime <7min


cooling method Water cooling + air cooling
Water cooler Cooling water temperature <=37ºC

Cooling water flow rate 10L/min
Supply voltage AC220V 50Hz
Attribute name Attribute value
Product Features
Color Silver, White
Performance customizable, Automatic, Excellent, easy operation, multi-function
Installation, Training and Setting-up Ready to provide advice on installation if needed, The buyer installs with the help of the manual
Standards Customized according to required standards, Customized with the best quality, CE
After sales services Lifetime
Warranty 1 Year

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