Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.
This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.
Application of plasma sputtering coater:
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
Plasma sputtering coater technical parameters:
Sample stage Size φ138mm Temperature control accuracy ±1ºC
Heating temperature Max 500ºC Rotate speed 1-20rpm adjustable
DC sputtering target head Quantity 2"×3

Vacuum chamber Chamber size φ180mm×150mm Watch window Omnidirectional transparent
Chamber material High purity quartz Opening mode Top cover removable
Vacuum system Mechanical pump rotary vane pump Pumping interface KF16
Vacuum measurement Resistance gauge Exhaust interface KF16
Ultimate vacuum 1.0E-1Pa Power supply AC;220V 50/60Hz
Pumping rate rotary vane vacuum pump: 1.1L/S
Power configuration Quantity DC power supply×1 Max output power 150W

Other parameters Supply voltage AC220V,50Hz Overall size 360mm×300mm×470mm
Total power 800W Total Weight 30kg