Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max)
Introduction of ultrasonic spin-spray coater

is a cost effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process
on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed
air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system
for substrate heating

Technical parameters of ultrasonic spin-spray coater

Features

Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate
Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate
The system also works on spin alone and spray alone modes
Spin Coater Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square
One oil-less pump for the vacuum chunk is included and controlled by the spin coater
Spin speed: 300 - 3000 rpm adjustable
For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Ultrasonic Spray Nozzle One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included
Two spray nozzles with the KF-25 adapter are included.
One cylindrical type -- narrower spray ~20 mm diameter
One cone type -- wider spray ~40 mm diameter
Recommended compressed air pressure for aqueous solution: ~2 psi
One flow meter is integrated for regulating and monitoring the compressed air flow
Fluid viscosity range: 1 - 50 mPa·s (cP)
One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Heatable Syringe Pump A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle
One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter
Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Heat Lamp and Control

Duo heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate)
Utility Requirement Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total
Gas: ~2 psi compressed air for the ultrasonic nozzle.
Net Weight 160 lbs
Shipping Weight & Dimensions #1: 423 lbs, 48x40x42"
#2: 155 lbs, 48x40x35"
Compliance CE Certified