Brief Introduction of Ultrasonic atmosphere heating spin coater:
Cy-SPC-HUA6 is a small and flexible spin coater, which can spray the glue on the substrate through the ultrasonic nozzle, and then evenly apply the glue on the substrate through high-speed rotation. It is also possible to directly perform the spin coating operation alone.
The chamber is equipped with heating elements, which can be baked after spinning coating
The product has a gas path controlled by a 2-way float flowmeter, which can pass inert gas into the chamber to protect the glue liquid from the gas in the air when spinning coating
This machine is suitable for surface coating of semiconductor wafer, slide, wafer, substrate, ITO conductive glass and other processes and plate making.
The maximum size of the crystallizable wafer is 6 inches, the rotational speed can reach 10000rpm, and the acceleration can reach 5000rpm;
It has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the thickness of spinning coating.
Functions and features of Ultrasonic atmosphere heating spin coater:
1. Adopt DC brushless motor, single chip microcomputer control
2. High-definition touch screen control
3. Single step and multi-step spinning coating operation can be carried out, five programs can be stored, and each program can be set with five steps of operation
4. Anti-blocking glue design
5. Aluminum alloy chamber, durable
6. It has various auxiliary functions such as ultrasonic, atmosphere, heating and so on, which can be used for spinning coating research

Technical parameter of Ultrasonic atmosphere heating spin coater:
Name ultrasonic assisted atmosphere spin coater
Substrate size 6inches
Rotation speed 100~10000rpm adjustable
Rotational acceleration 100~5000rpm/s adjustable
Longest spinning time(a single time) 3000s
chamber size Φ200mm* 90mm
Voltage 220V 50Hz
Power 400W
Heating Temp 0-100ºC
Warranty 1 year, life-long technical support, excluding vulnerable parts

Ultrasonic system
Atomizing head Material Titanium alloy
Frequency 40kHz
Power 130W
Flow 0.55mL/s
Particle diameter 25um
Atomizing head type Cone type
Atomizing head weight 0.3kg
Ultrasonic power supply Size:315*312*135mm,weight:5kg

Syringe pump
Flow range 0.001uL/min-43.349mL/min
Power down memory function Save the setting parameters, no need to set them after power on again
Injector 10uL-1000uL
Syringe 1mL-60mL
Linear speed range 5um/min-65um/min
Linear speed adjustment resolution 5um/min
Maximum stroke 140mm
Travel resolution 0.156um
Rated linear thrust >90N

Flowmeter
Control gas type 2
Gas flow rate 16-160mL/min