Product description of Single-chamber organic-inorganic thermal evaporation coating system:
The equipment is mainly composed of an organic/metal source evaporation deposition chamber, a vacuum exhaust system, a vacuum measurement system, an evaporation source, a sample heating temperature control, an electric control system, and a gas distribution system.

Application of Single-chamber organic-inorganic thermal evaporation coating system:
Single chamber organic inorganic thermal evaporation system is used for preparing metal elemental film, semiconductor film, oxide film, organic film, etc., and can be used for research work of new materials and new process films by scientific research units, and also for testing work before mass production.

Technical specifications of Single-chamber organic-inorganic thermal evaporation coating system:
Ultimate vacuum ≤ 6.7 *0 Pa
Recovery vacuum time pumping from 1*10 Pa to 5*10 Pa≤20min

System leakage rate 6. 7* 10-7Pa.L / S;
Vacuum chamber Ф450*500mm cylindrical vacuum chamber, 1-8 high temperature or low temperature beam source furnaces can be placed in the vacuum chamber;
Evaporation temperature heating temperature: room temperature to 800ºC
Distance The evaporation boat is on the circumference of 100-160 mm from the center; the evaporation boat can be lifted up and down, and the adjustment range is 0-150 mm (the distance between the sample center and the crucible is 150-300 mm);
Workbench type and size sample tray diameter Φ300mm, can be placed on a small sample of 20mm diameter; sample tray has a rotation function, the speed is 0 ~ 20 rev / min, the speed is adjustable; the sample tray can swing angle, angle is 0 to 30 degrees adjustable;
Baking temperature 400ºCdigital display automatic thermocouple temperature control (high temperature furnace plate, digital display automatic thermocouple temperature control can be heated to 700 ºC)
Resistance evaporation source voltage 5V, 10V, power 2.5KW, water-cooled electrode 1~8 pairs
Quartz crystal film thickness control instrument film thickness measurement range 0-999999μ
Optional Optional molecular pump set or cryopump combined vortex dry pump pumping system and glove box
Computer system realize vacuum pump control function, mechanical pump and cryopump interlock control function, substrate rotation speed control function.