Application of Film thickness monitor:
The control and display of the film thickness monitor are realized by the touch screen, which enables you to obtain complete deposition data, including the rate, thickness and coating time, etc. it is suitable for the measurement of vacuum coating thickness, such as ordinary evaporation, electron beam evaporation, magnetron sputtering, ion plating, etc., especially for the film monitoring of multi evaporation source coating machine and multi chamber coating machine.
Technical features of Film thickness controller:
Simultaneous operation: up to six probes can be monitored at the same time,each channel is set freely, which can operate independently or jointly.;
Two sets of relay output, reaching the set thickness to automatically close the baffle / evaporation source;
Full touch screen operation display, simple and easy to use;
Provide RS232 / RS485 interface, MODBUS RTU standard protocol, Multi - baud rate optional, and equipped with special control software.
Technical parameters of Film thickness controller:
Crystal frequency 6MHz (Optional 2.5M 3M 5M 9M crystal)
Display mode 5 "color touch screen + digital tube display rate and solid thickness
Operating mode Touch screen
Thickness display range 0-99μ9999Å
Thickness display resolution 1Å(aluminium)
Rate display range 0-999.9Å
Rate display resolution 0.1Å/s
Number of coating layers 99
Probe input 4/6 way (Can work at the same time)
Tool factor 0.01-99.99
Material storage 257kinds+10 customization
Communication RS232/RS485 MODBUS RTU
Baffle / source control 2 sets of contacts, reaching the thickness shutoff / evaporation source
Coating display Rate curve / value
Coating circuit times 99
Size 480×250×89mm(2U 19")
Special features of Film thickness controller:
(1) Set the working state of each circuit arbitrarily, and stop coating manually
(2) It can display the coating layer, material and crystal oscillation frequency percentage;
(3) The monitoring thickness, crystal frequency, material and layer after coating are displayed.
| Attribute name | Attribute value |
|---|
| Metering | Thickness |
| Color | Black |