Main features
1. This machine can be connected to a computer.
2. The display has the advantages of simple interface, intuitive, reasonable, convenient and fast operation, etc. It can visually display the measured film thickness, rate, frequency, percentage of PWM control output and other working states.
3. You can set the gating time, output mode, rate algorithm, material parameters, output range and communication parameters through software or display instrument, and write the related data to Excel file.
4. It has the advantages of ultra-small size, high measurement accuracy, simple operation and convenient use.

Technical parameters
EQ-TM106-1 monitoring module
1. Power supply: DC 5V (± 10%), maximum current 400mA
2. Frequency resolution: ± 0.03Hz
3. Film thickness resolution: 0.0136Å (aluminum)
4. Accuracy of film thickness: ± 0.5%, depends on process conditions, especially the position of the sensor, material stress, temperature and density
5. Measurement speed: 100ms-1s / time, can be set
6. Measuring range: 500000Å (aluminum)
7. Standard sensor crystal: 6MHz
8. Computer interface: RS-232 / 485 serial interface (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data bit: 8, stop bit: 1, check: none)
9. Analog output: 8-bit resolution, PWM pulse width modulation output (open collector or internal 5V output)
10. Working environment: temperature 0-50 ºC, humidity 5% -85% RH, no condensed water beads
11. Dimensions: 90mm × 50mm × 18mm