Product description of CVD sample preparation system

1200ºC three heating zone high vacuum CVD coating machine CY-O1200-50IIIT-3Z-HV consists of a three-heating zone tube furnace, a three-channel mass flow meter ,a high vacuum molecular pump set.

tube furnace:
The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections temperature rise and fall program, with overheating and short circuit protection.
The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
mass flowmeter:
The system is equipped with three-channel mass flow meter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
vacuum system:
The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

applications:1200ºC three heating zone high vacuum CVD coating machine
This equipment is used by its customers to research, design, and manufacture these materials or coatings for aerospace engine components, medical implants, semiconductors, solar cells, smart glass, carbon nanotubes, nanowires, LEDs, MEMS, and other applications.


Technical parameters of CVD coating machine
Vacuum tube furnace Model CY-O1200-50IIIT
Tube material High purity quartz
Tube diameter 50mm (Optional 60mm, 80mm, 100mm)
Tube length 1300mm
Furnace chamber length 1060mm
Heating zone length 300mm+300mm+300mm
Operating temperature 0~1100ºC
Temperature control accuracy ±1ºC
Temperature control mode 30 or 50 segment program temperature control
Display mode LCD
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
Gas supply system Model CY-3Z
Gas channel 3-channel
Measuring unit Gas mass flow meter
Measuring range A channel: 0~100 SCCM H2 gas Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 0~300SCCM N2 gas
C channel: 0~500SCCM Ar gas
measurement accuracy ±1.0%F.S
Pipe pressure resistance 3MPa
Working pressure difference 50~300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface specification 1/4" ferrule connector for gas inlet and outlet
Exhaust system Model CY-GZK103-A
Molecular pump CY-600
Backing pump Rotary vane pump
Pumping rate Molecular pump: 600L/S Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa
Rotary vane pump: 1.1L/S
Pumping interface KF40
Exhaust interface KF16
Vacuum measurement Compound vacuum gauge: Resistance gauge + ionization gauge
Ultimate vacuum 1.0E-5Pa
Power supply AC:220V 50/60Hz
NOTE According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter