1200c CVD equipment consists of two heating zone tube furnaces, a float flow meter and a vacuum pump


Product description of vacuum CVD equipment

1200ºC two heating zone low vacuum CVD equipment with 3-channel mass flow meter CY- O1200-50IIT-3Z-LV consists of a two-heating zone tube furnace, a three-channel float flow meter and a double stage rotary vane vacuum pump.

tube furnace
The two heating zones of the tube furnace on the CVD equipment are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form two temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections program of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
flow meter
TheCVD equipment is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200ºC two zone low vacuum CVD equipment application:
our CVD equipment is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

Technical parameters of vacuum CVD equipment
Vacuum tube furnace Model CY- O1200-50IIT
Tube material High purity quartz
Tube diameter 50mm (Optional 60mm, 80mm, 100mm)
Tube length 1000mm
Furnace chamber length 440mm
Heating zone length 200mm+200mm
Operating temperature 0~1100ºC
Temperature control accuracy ±1ºC
Temperature control mode 30 or 50 segment program temperature control
Display mode LCD
Sealing method 304 stainless steel vacuum flange
Flange interface 1/4" ferrule connector, KF16/25/40 joint
Vacuum 4.4E-3Pa
Power supply AC:220V 50/60Hz
Gas supply system Model CY-3Z
Gas channel 3-channel
Measuring unit Gas mass flow meter
Measuring range A channel: 0~100SCCM H2 gas Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 0~300SCCM N2 gas
C channel: 0~500SCCM Ar gas
measurement accuracy ±1.0%F.S
Pipe pressure resistance 3MPa
Working pressure difference 50~300KPa
Connecting pipe 304 stainless steel
Gas channel 304 stainless steel needle valve
Interface specification 1/4" ferrule connector for gas inlet and outlet
Exhaust system Mechanical pump Rotary vane pump
Pumping rate 1.1L/S
Exhaust interface KF16
Vacuum measurement Resistance gauge
Ultimate vacuum 1.0E-1Pa
Power supply AC:220V 50/60Hz
Pumping interface KF16
NOTE According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter