Dual Zones plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system
Introduction of PECVD system with roll to roll device: The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the mo...
Introduction of PECVD system with roll to roll device:
The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200ºC2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment..
PECVD with roll to roll system technical parameter:
Technology Specifications of PECVD system with roll to roll device:
1200ºC2-heating-zone open tube furnace
Item Detail
Voltage AC220V,50Hz
Max power 3KW
Heating zone Dual zones 200mm+200mm
Working temperature ≤1200ºC
Temperature control accuracy ±1ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1400mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Resistance gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
Vacuum pump Bipolar rotary vane vacuum pump
Ultimate vacuum 10^-1Pa
Three-way mass flowmeter
Item Detail
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (Ar)
0~200 SCCM(H2)
0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz
RF power
Item Detail
Output Power 500W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Water cooling
The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200ºC2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-way proton flowmeter gas supply system. The whole system can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment..
PECVD with roll to roll system technical parameter:
Technology Specifications of PECVD system with roll to roll device:
1200ºC2-heating-zone open tube furnace
Item Detail
Voltage AC220V,50Hz
Max power 3KW
Heating zone Dual zones 200mm+200mm
Working temperature ≤1200ºC
Temperature control accuracy ±1ºC
Temperature control method AI-PID 30-stage process curve, can store multiple
Tube material High purity quartz
Tube size φ80mm I.D x 1400mm L
Sealing mode Stainless steel vacuum flange
Vacuum measurement Resistance gauge
Working gas Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen
Vacuum pump Bipolar rotary vane vacuum pump
Ultimate vacuum 10^-1Pa
Three-way mass flowmeter
Item Detail
Valve type Stainless steel needle valve
Gas channels Three-way
Pressure range 0.05~0.3MPa
Range 0~100 SCCM (Ar)
0~200 SCCM(H2)
0~500 SCCM(CH4)
Flow control range ±1.5%
Mixing tank volume 750mL
Gas path material 304 stainless steel
Pipe interface 6.35mm Bite type joint
Power supply AC220V 50Hz
RF power
Item Detail
Output Power 500W
Output accuracy ±1%
RF frequency 13.56MHz
RF stability ±0.005%
Cooling method Water cooling
| Attribute name | Attribute value |
|---|---|
| Product Features | |
| Color | Silver |
| Measurement method | Vacuum gauge, Temperature controller |
| Performance | automatic, multi-function, wide application, High precision, High technical content, Precise temperature control |
| Standards | According to customer requirements, CE |
| Installation, Training and Setting-up | Video technical support, Online technical support, Product Manual |
| Warranty | 1Year |
| After Sale Services | lifetime |